| ACCEPTANCE CRITERIA |
| 200mm Rapid Thermal Process Equipment Control System Upgrade |
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| ITEM |
ITEM DETAILS |
SPECIFICATION |
| System Hardware |
1. GUI controller |
New Win10 GUI Controller with New S/W |
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Dual SSD with RAID Configuration |
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FRONT USB TO REPLACE FLOPPY DISK DRIVE |
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INTERFACE DIRECTLY WITH ATP CARDS |
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GEM.SECS S/W |
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2. System operating specification |
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Wafer handling |
Automatic serial processing, using standard cassette |
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Throughput |
Process dependant, Approximately 80 wafers per hours |
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In a null cycle, without flat finder |
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Wafer sizes |
8 inches |
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Ramp-up rate |
Programmable, up to 100℃ per second with ceramic shield; |
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up to 150℃ per second without ceramic shield. |
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Steady state duration |
1~600 seconds per step. |
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Ramp-down rate |
Programmable, 1~250℃ per second. Ramp down rate is |
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temperature and radiation dependent, maximum 150℃ per second. |
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Recommended steady state temperature range |
400℃-1200℃ |
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ERP temperature accuracy |
±2.9℃, when calibrated against an instrumented temperature wafer (ITC). |
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Temperature repeatability |
±2.3℃ or better at 1150℃ wafer to wafer. |
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(Repetition specification are based on a 100-wafer set.) |
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RTO=±0.75%, RTA=0.75%, expressed in perentage deviations (Max.-Min)/ 2xMean |
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Temperature uniformity |
±3℃ across an 8-inch wafer at 1150℃. |
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This is a 1-sigma deviation from 100-angstrom oxide uniformity.) for a titanium silicidation process, no more than 1.5 percent increase to uniformity during the first anneal at 650℃~700±℃. |
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RTO=±1.0%, RTA=1.0% |
| GEM/Secs |
3. GEM/Secs specification |
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- FUNDAMENTAL GEM REQUIREMENTS |
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State Models |
Yes |
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Equipment Processing State |
Yes |
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S1, F13/F14 Scenarios |
Yes |
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Event Notification |
Yes |
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On-Line Notification |
Yes |
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Error Messages |
Yes |
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Documentation |
Yes |
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- ADDITIONAL CAPABILITIES |
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Estabilish Communications |
Yes |
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Dynamic Event Report Configuration |
Yes |
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Variable Data Collection |
Yes |
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Trace Data Collection |
Yes |
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Status Data Collection |
Yes |
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Alarm Menagement |
Yes |
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Remote Control |
Yes |
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Equipment Constants |
Yes |
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Process Program Management |
Yes |
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Material Movement |
Yes |
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Equipment Terminal Service |
Yes |
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Limit Monitoring |
Yes |
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Spooling |
Yes |
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