Thermal Oxidation & LP Nitride Furnace
Pyro Oxidation, LPCVD Nit Furnace
Single Wafer Clean Process
Pre-Dep & Post-Etch Clean Process(DHF, SC-1, LAL15, DSP)
If you wish to use materials that do not have the public domain attached, please use them after prior consultation with the person in charge of the NATIONAL NANOFAB CENTER website.