구 매 사 양 서

COMMODITY DESCRIPTION

[품명(Description)] 대면적 이온밀링시스템 [Wide Area Ion Milling System]
품목번호 Item No.	관세분류번호 HSK No.	정부물품분류번호	단위 Unit	수량 Q'ty
1	8456.12.9000	4110170801	System Set	1

᤾ 용도 및 특징

이온밀링시스템은 주사전자현미경 분석을 위한 시편전처리 장치로서, Ar 이온빔을 이용하여 시료의 단면 및 평면을 매끄럽게 연마하는 용도로 사용되는 장비임. 본 장비는 XY stage를 이동하면서 최대 10 mm까지 대면적으로 단면 가공이 가능하며, 대기비개방(Air Protection) 홀더를 통해 시료 준비와 가공 뿐만 아니라 SEM 챔버로 이송하고 관찰할 때까지 대기에 노출하지 않은 상태로 재료 고유의 형태를 분석할 수 있음. 또한, 이온빔에 의한 열데미지를 방지하기 위해 냉각시스템(Cooling Temperature)을 이용하여 가공 온도를 설정할 수 있고, 다양한 조건(가속전압, 가공영역, 반복작업 등)을 레시피로 설정하여 자동 가공이 가능함.

᤾ 장비 구성

1. Main Body 1 set

2. Optical Microscope for sample alignment 1 set

3. Sample stage for cross-section milling 1 set

4. Sample stage for flat milling 1 set

5. Wide Area milling unit 1 set

6. Oil mist trap 1 set

7. Vibration proof-materials for R.P. 2 sets

8. Flexible tube 1 set

9. Service tool kit 1 set

10. Gloves 1 set

᤾ 성능 및 규격

1. Ion gun unit

1) System : Penning system

2) Accelerating voltage : 0 to 8 kV (0.1 kV/step) or more

3) Discharge voltage : 0 to 2 kV (0.1 kV/step) or more

4) Milling rate :

- Cross-section milling : over than 1 mm/hr on Si at 8 kV

- Flat milling : 32 μm/hr (Illunination angle : 60°) or more (Spot)

3 μm/hr (Illunination angle : 0°) or more (Flat)

5) Ion beam Intermittent Irradiation function

- Function that irradiates the beam intermittently

- Enable/disable setting and ON time/OFF time setting is possible

- ON/OFF time setting : 1 sec. to 59 min. 59 sec. or more

6) Milling time setting : 1 sec. to 59 hr. 59 min. 59 sec. or more

7) Ar gas flow control : High accuracy Mass flow control

- Ar gas setting range : 0.00 to 1.00 cm3/min. or more

2. Stage for cross-section milling

1) X movement : ±6 mm or more

2) Y movement : 3 mm or more

3) Sample rotation : ±3° or more

4) Swing angle : ±15°, ±30°, ±40°(selectable) or more

5) Sample swing speed : User selectable

6) Max. sample size : 20 mmW x 12 mmD x 7 mmH or more

7) Maximum milling area : over than 10 mm width (0.01 mm/step control with wide area milling unit)

8) Milling condition control : 6 steps or more

3. Stage for flat milling

1) X movement : 0 to 5 mm or more

2) Tilt angle : 0 to +90°

3) Sample rotation speed : 1 rpm, 25 rpm or more

4) Sample swing speed : 1 rpm, 10 rpm or more

5) Swing angle : ±60°, ±90° (selectable) or more

6) Max. sample size : 50 mmΦ x 25 mmH (Tilt : 0° to 90°) or more

7) Maximum milling area : 32 mm diameter (Tilt angle : 60° to 80°) or more

8) Milling condition control : 6 steps or more

4. Cooling Temperature Control (CTC) function

1) Cooling method : LN2 to cool the specimen via mask

2) Maximum Cooling Temperature : -100℃ or less

3) Minimum setting temperature : 1℃ or less

4) LN2 Dewar Bottle Capacity : ~800cc or more

5) Maintained Cooling Duration : ~6 hrs or more

6) Temperature Cooling Time : ~30 min. or less to be attained to –50℃

5. Pumping : TMP + Sub-pump or more

᤾ 악세서리

1. Specimen stub assy for cross-section milling 5 ea

2. Mask (5ea/set) 2 sets

3. Objective lens x5 set 1 set

4. Advanced Control Software (ACS) 1 set

5. Air protection system including AP cross-section holder 1 set

6. Air protection flat holder 2 sets

7. Specimen base for air protection 1 set

8. AP sample setting tool set 1 set

9. AP mask (5ea/set) 1 set

10. Local supplied item (Including VAT)

1) Oil rotary pump with OMT 1 set

1) PC & 27" monitor for ACS 1 set

᤾ 기타

1. Installation : To be executed by maker trained engineer free of charge

2. Warranty : One year after installation

3. Training : Operation training will be carried out by a qualified engineer at that time of installation free of charge