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0.18㎛ Technology
0.13㎛ Technology
Intelligent semiconductor
Nano-Bio platform
Microfluidic device·chip
MEMS in vitro diagnostic biosensor
Healthcare device
USB (User Switchable Biosensor) packaging
Next-generation sensor manufacturing platform
Thick MEMS
Thin MEMS
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Photo
I line stepper
Maker
Nikon
Model
i11D
Id
LST10,20
View
Photo
Overlay measurement
Maker
Auros
Model
OL100n
Id
LOA20
View
Photo
Overlay measurement
Maker
KLA-Tencor
Model
ARCHER-10XT
Id
LOA10
View
Photo
Critical-Dimension Scanning Electron Microscope(CD-SEM)
Maker
Hitachi High-Technologies Coporation
Model
CS4800
Id
LCD40
View
Photo
CD SEM
Maker
Hitachi
Model
S-9260a
Id
LCD10
View
Photo
ACT8 Track
Maker
Tokyo Electron Limited(TEL)
Model
ACT8
Id
LTS40
View
Photo
ArF Dry Scanner
Maker
ASML
Model
XT1250D
Id
LTS40
View
Photo
Track system
Maker
SEMES
Model
K-spin8
Id
LTS30
View
Q
uick
Menu
Wafer
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8-inch
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12-inch
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